Single Substrate Integration of Optical Waveguides, Microfluidic Circuitry and Photodiodes
نویسندگان
چکیده
We present a device with integrated buried optical waveguides, a microfluidic channel and photodiodes. This device can, for instance, be used as detection unit for absorption measurements on very small volumes (sub nanoliter) of fluid. The fabricated waveguide and diode structures exhibit a low noise equivalent power of 0.5 nW (488 nm, 10 Hz), demonstrating the possibility of using this setup for low light level measurements.
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